The FS1012 MEMS mass flow sensor module measures the flow rate using the thermotransfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistorbased flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signaltonoise ratio. The sensor comprises a solid thermal isolation technology and siliconcarbide coating to protect
it from abrasive wear and provides robustness and longterm reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 features the sensor fully assembled and wirebonded out to a 6pin header. Wetted materials consist of a glass fiber reinforced PA66 resin, epoxy, and silicon carbide.

Applications:

1. Process controls and monitoring
2. Oil and gas leak detection
3. HVAC and air control systems
4. CPAP and respiratory devices
5. Liquid dispensing system

Features:

1. Gas or liquid mediums
2. Robust solid isolation technology
3. Resistant to surface contamination
4. No cavity to cause clogging
5. Resistant to vibration and pressure shock
6. Low power application
7. Sensitive at low flow rates and differential pressure levels

Specifications:

1. Fast response: <5ms
2. Millivolt output
3. Supply voltage: 3V to 5V
4. Module operating temperature range: 0C to +85C

For more info., refer to datasheet

Packages Includes:

1 x RENESAS Flow Sensor, FS1012 Series, Gas, MEMS, 10000 SCCM, 3 V to 5 V, mV Output